P04900 - SEMI P49 - Specification for Experimental Curvilinear Multigon Extension to SEMI P39 Revision:SEMI P49-0823 (Preliminary) - Current SEMI D31-0213 (technical revision)

SEMI D31-0213 (technical revision)

Modules/SIP

Referenced SEMI Standards (purchase separately)SEMI A1 — Specification for Horizontal Communication (HC) Between Equipment for Factory Automation System

The following method has given satisfactory results in determining trace metal impurities at the specified value for each of the target trace metals

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P04900 - SEMI P49 - Specification for Experimental Curvilinear Multigon Extension to SEMI P39 Revision:SEMI P49-0823 (Preliminary) - Current SEMI D31-0213 (technical revision)NOTICE: This is a Preliminary Standard. Preliminary Standards are approved for publication by a single chapter of a technical global committee for information and comment prior to letter balloting for its adoption as a Full consensus Standard. Preliminary Standards are published for a period of no more than two years, unless a publication extension is granted by the International Standards Committee. This Preliminary Standard will be removed from