E01000 - SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization StdTpc-Process Chemicals - Bases semiconductor processes as reflected in

semiconductor processes as reflected in a number of existing standards

SEMI F61 — Guide for Ultrapure Water Systems Used in Semiconductor Processing

The values given in parentheses are for information only

and behavior are not required to be compliant to this Specification

SEMI D39-0704 (Reapproved 0117)

E01000 - SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization StdTpc-Process Chemicals - Bases semiconductor processes as reflected in1 Purpose 1. 1 This Specification establishes a common basis for communication between users and suppliers of manufacturing equipment in the semiconductor and related industries by providing a standardized methodology for measuring reliability, availability, and maintainability (RAM) and utilization performance of equipment in a manufacturing environment. 2 Scope 2. 1 This Specification defines six mutually exclusive, basic equipment states for all of