E13900 - SEMI E139 - レシピとパラメータに関する管理の規定（RaP） StdPbc-0823 1 — Specification for XML

1 — Specification for XML Schema for Substrate Mapping

and SEMI F95)

Microelectromechanical systems (MEMS) are miniaturized systems requiring packaging for environmental protection and for interconnection

This Specification is intended to be used with the polished wafer specification (SEMI M1)

The purpose of this Document is to provide a guide for zirconium tert-butoxide for which a need has been identified

E13900 - SEMI E139 - レシピとパラメータに関する管理の規定（RaP） StdPbc-0823 1 — Specification for XML, global Information & Control Committee global Audits and Reviews Subcommitteewww. semiviews. orgwww. semi. org > SEMI E139SEMI E139. 3 Factory Information & Control System: FICS 6: FICS FICS SEMISEMI E40 FICS FICS 77. 13 Subordinate Documents: SEMI E139. 1 0310 XML Schema for the RaP PDE SEMI E139. 2 1108 SECS II Protocol for Recipe and Parameter Management (RaP) SEMI E139. 3 1211 XML SOAP Binding for Recipe and Parameter Management Referenced SEMI