G01800 - SEMI G18 - Specification for Integrated Circuit Leadframe Material Used in the Production of Etched Leadframes StdPbc-0418 See Related Information 1 appended

See Related Information 1 appended to this Standard

FPD製造に使用するプロセスツールのツールポートに関わる主要な要求事項を規定する。これらの主要要求事項は，それらを標準化することによって，搬送装置とツール間のインタフェースをうまく機能することにある。この標準化は，マテリアルハンドリング装置の選択に自由度を持たせて，コスト低減に配慮したインタフェースを奨励することを目的とする。

SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance

The scope of this Specification is grades of buffered oxide etchants used in the semiconductor industry

ceramic and membrane construction

G01800 - SEMI G18 - Specification for Integrated Circuit Leadframe Material Used in the Production of Etched Leadframes StdPbc-0418 See Related Information 1 appendedNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification is for the leadframe material that will be shipped to an etch house. It is a leadframe specification, but deals with material aspects only. This Specification covers the special requirements for metal