F06700 - SEMI F67 - Test Method for Determining Inert Gas Purifier Capacity Revision:SEMI F67-1101 (Reapproved 0713) - Current 本スタンダードは，global Physical Interfaces & Carriers

本スタンダードは，global Physical Interfaces & Carriers Committeeで技術的に承認されている。現版は2009年5月13日，global Audits and Reviews Subcommitteeにて発行が承認された。2009年6月にwww

color filter

SEMI E77-1104 (technical revision)

this is beyond the scope of this Standard because the as-received wafers rarely contain oxygen precipitates large enough to impact GOI

6  A messaging service includes the identification that a message shall be exchanged and a definition of the data which is contained in that message

F06700 - SEMI F67 - Test Method for Determining Inert Gas Purifier Capacity Revision:SEMI F67-1101 (Reapproved 0713) - Current 本スタンダードは，global Physical Interfaces & CarriersThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at www. semiviews. org and www. semi. org in July 2013; originally published November 2001; previously published November 2008. The purpose of this Document is to define a test method to quantify impurity removal capacity of inert gas purifiers. To determine