P01800 - SEMI P18 - Specification for Overlay Capabilities of Wafer Steppers StdPbc-0714 SEMI D45-0706 (Reapproved 0412)

SEMI D45-0706 (Reapproved 0412)

or specific components when dedicated training equipment is not available

この安全ガイドラインは，危険性ガスのFLDを取り扱うものである。これらのデバイスは，FLDあるいはその下流で，制御されない放出の流量を制限することを意図している。

SEMI MS5-1107 (first published)

1 mmがすべての基板に適応する。

P01800 - SEMI P18 - Specification for Overlay Capabilities of Wafer Steppers StdPbc-0714 SEMI D45-0706 (Reapproved 0412)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. Definitions for the overlay capabilities of wafer steppers are established, consistent with the primary application of wafer stepper (i. e., the manufacturing of very large scale integrated circuits). Also included are