M04400 - SEMI M44 - シリコン中の酸素の換算係数ガイド StdTpc-Stainless Steel Components Application of this Test Method

Application of this Test Method is expected to yield comparable data among filters or gas systems

) that can be described by metadata are to be separately specified in a document dedicated to those concepts

and specimen surface preparation specified in this Test Method are to be preferred for all referee measurements on bulk silicon wafers

and completion of automated and manual carrier transfers to and from the equipment and

This is already the case for many special purpose wafers with lower modulus of elasticity and is becoming more common in mainstream applications

M04400 - SEMI M44 - シリコン中の酸素の換算係数ガイド StdTpc-Stainless Steel Components Application of this Test Methodglobal Silicon Wafer Committee20101221global Audits and Reviews Subcommittee20112www. semiviews. org www. semi. org2001320053 1107 cm 1IOC 88 1,2 1970 Referenced SEMI Standards SEMI M59 Terminology for Silicon Technology SEMI MF1188 Test Method for Interstitial Atomic Oxygen Content of Silicon by Infrared Absorption with Short Baseline