E03900 - SEMI E39 - 객체 서비스 표준: 컨셉트, 동작, 서비스 Revision:SEMI E39-0703 (Reapproved 1109) - Superseded The purpose of this Standard

The purpose of this Standard is to define a test method for the determination of the outgassing organic contamination from minienvironments used for storage and transport of wafers using gas chromatography/mass spectroscopy (GC/MS)

3DS-IC Global Technical Committeeで技術的に承認されている。現版は2012年8月30日，global Audits and Reviews Subcommitteeにて発行が承認された。2012年9月にwww

色特性測定方法に関しては

services and behaviors described for the VPD are either required or optional for each pump type

The scope of this Specification is to define:

E03900 - SEMI E39 - 객체 서비스 표준: 컨셉트, 동작, 서비스 Revision:SEMI E39-0703 (Reapproved 1109) - Superseded The purpose of this StandardGlobal Information & Control Committee , 2009 9 4 Global Audits and Reviews Subcommittee . 1995 , 2003 7 . www. semi. org . (Object Services Standard (OSS)) , . . (Standard) . (Standard) public , . (Standards) , (Object Services) . . (Standards) , (Standards) . Subordinate Document: SEMI E39. 1 0703 (Reapproved 1109) SECS II Protocol for Object Services Standard (OSS) Referenced SEMI Standards SEMI E5 SEMI Equipment Communications Standard 2 Message