E03400 - SEMI E34 - マスフローデバイス返還のためのガイドライン StdPbc-0212 In most cases

In most cases

SEMI E134-0319 (technical revision)

This method is not suitable for direct sampling from high pressure cylinders at pressures above 8 × 105 Pa (8 atmospheres)

The scope of this Document is a grade of 50% sodium hydroxide solution used in the semiconductor industry

particularly in welded components or tubing exposed to corrosive gases with moisture present

E03400 - SEMI E34 - マスフローデバイス返還のためのガイドライン StdPbc-0212 In most casesNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Referenced SEMI Standards None.