F02600 - SEMI F26 - グレード10/0.2　有毒特殊ガスの粒子に関する仕様 Revision:SEMI F26-0697 (Reapproved 0712) - Superseded or any other interested party

or any other interested party

SEMI M1-92 (technical revision)

no materials requirements or micro-contamination limits are given in this Specification

it is necessary to standardize the classification of Mura for LCD

Standardizing INAA for application to silicon will remove differences in the analytical approach and will establish a common reference for the analyses

F02600 - SEMI F26 - グレード10/0.2　有毒特殊ガスの粒子に関する仕様 Revision:SEMI F26-0697 (Reapproved 0712) - Superseded or any other interested partyglobal Gases Technical Committee2012618global Audits and Reviews Subcommittee20127www. semiviews. org www. semi. org1997620033 10 0. 2 8 105 Pa 88 105 Pa 8 NH3 AsH3 PH3 Referenced SEMI Standards None.